MEMS kHz Oscillators

SiTime’s micro-electro-mechanical systems (MEMS) kHz oscillators are extremely small, low-power 32 kHz devices optimized for mobile and other battery-powered applications. The silicon MEMS technology enables an ultra-small footprint and chip-scale packaging. These parts enable greater component placement flexibility and they eliminate external load capacitors which saves additional component count and board space. SiTime utilizes NanoDrive™ technology which is a factory-programmable output that reduces the voltage swing to minimize power. TempFlat MEMS™ technology is also available which enables the first 32 kHz ±3 parts per million (ppm) super-TCXO in a 1.2 mm x 1.2 mm footprint.

SiTime's MEMS oscillator consists of a MEMS resonator and a programmable analog circuit. The kHz MEMS oscillator is built with SiTime’s unique MEMS First™ process. A key manufacturing step is EpiSeal™ during which the MEMS resonator is annealed with temperatures over +1,000°C. EpiSeal creates an extremely strong and clean vacuum chamber that encapsulates the MEMS resonator ensuring high performance and high reliability in harsh environments.